Venue (Journal)
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Also Known As
JVST B, Nanotechnology & microelectronics, JVST B, Journal of vacuum science and technology., Nanotechnology & microelectronics, Nanotechnology and microelectronics, Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
4.3K
Publications
45.1K
Citations
600
Concepts
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 60 | 1.3K | 31.7K |
2 | Natural Sciences | 28 | 122 | 3K |
3 | Medicine | 20 | 50 | 1.1K |
4 | Health Sciences | 14 | 16 | 361 |
5 | Education | 10 | 12 | 215 |
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
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4.3K
Publications
45.1K
Citations
Showing yearly statistics from 2000-2026.
| Year | Citations | |
|---|---|---|
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