Camille Petit-Étienne

Ultralow-loss tightly confining Si₃N₄ waveguides and high-Q microresonators

Houssein El Dirani, Laurène Youssef, Camille Petit-Étienne et al. · Optics Express · 2019 · 144 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas

G. Cunge, Djawhar Ferrah, Camille Petit-Étienne et al. · Journal of Applied Physics · 2015 · 83 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing

Camille Petit-Étienne, Maxime Darnon, Laurent Vallier et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 74 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Open Air Deposition of SiO₂ Films by an Atmospheric Pressure Line‐Shaped Plasma

Xiaodong Zhu, Farzaneh Arefi‐Khonsari, Camille Petit-Étienne et al. · Plasma Processes and Polymers · 2005 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +12

Programmable frequency-bin quantum states in a nano-engineered silicon device

Marco Clementi, Federico Andrea Sabattoli, Massimo Borghi et al. · Nature Communications · 2023 · 58 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17