Statistics
Publications
3
Citations
121
H-Index
3
Active since
2002
Laurent Vallier is an author at Centre National de la Recherche Scientifique specializing in electronic materials, microelectronics, and electrical engineering.
Publications per year
2002–2012
3
3
Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing
Camille Petit-Étienne, Maxime Darnon, Laurent Vallier et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 74 citations · Full text
Design of notched gate processes in high density plasmas
J. Foucher, G. Cunge, Laurent Vallier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 21 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
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