J. Foucher

High immunity to threshold voltage variability in undoped ultra-thin FDSOI MOSFETs and its physical understanding

O. Weber, O. Faynot, F. Andrieu et al. · 2008 · 159 citations

Device Modeling, Semiconductor Technology, Electrical Engineering +14

Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy

Gregory A. Dahlen, Marc Osborn, Nihat Okulan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 71 citations

Image Reconstruction, Engineering, Complex Structures +25

Hydrogen annealing of arrays of planar and vertically stacked Si nanowires

E. Dornel, T. Ernst, J.-Ch. Barbé et al. · Applied Physics Letters · 2007 · 50 citations

Engineering, Nanodevices, Si Nanowires +25

Linewidth roughness transfer measured by critical dimension atomic force microscopy during plasma patterning of polysilicon gate transistors

E. Pargon, M. Martin, J. Thiault et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 42 citations

Engineering, Microscopy, Linewidth Roughness Transfer +21

Hyperbranched Polymers for Photolithographic Applications – Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances

Christos L. Chochos, Esma Ismailova, Cyril Brochon et al. · Advanced Materials · 2008 · 42 citations

Engineering, Chemistry, Molecular Polymer +19