Marc Osborn

Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy

Gregory A. Dahlen, Marc Osborn, Nihat Okulan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 71 citations

Natural Sciences, Materials Engineering, Materials Science +17

Orientation dependence of domain wall spacing and losses in 3-percent Si-Fe single crystals.

J. Shilling, William G. Morris, Marc Osborn et al. · IEEE Transactions on Magnetics · 1978 · 61 citations

Natural Sciences, Materials Science, Physics +13

Advanced atomic force microscopy probes: Wear resistant designs

M. Klonowski, David Kneeburg, Gregory A. Dahlen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +17

Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node

Gregory A. Dahlen, Marc Osborn, Bernard Haochih Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations

Natural Sciences, Biomedical Engineering, Biomedical Imaging +15

Advanced CD-AFM probe tip shape characterization for metrology accuracy and throughput

Bernard Haochih Liu, Jason Osborne, Marc Osborn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

Engineering, Materials Engineering, Materials Science +15