Jason Osborne

Advanced measurement and diagnosis of the effect on the underlayer roughness for industrial standard metrology

Jung Hwan Kim, Seunghyun Moon, Ji-Woong Kim et al. · Scientific Reports · 2019 · 20 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node

Gregory A. Dahlen, Marc Osborn, Bernard Haochih Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations

Natural Sciences, Biomedical Engineering, Biomedical Imaging +15

Advanced CD-AFM probe tip shape characterization for metrology accuracy and throughput

Bernard Haochih Liu, Jason Osborne, Marc Osborn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

Engineering, Materials Engineering, Materials Science +15

TEM validation of CD AFM image reconstruction

Gregory A. Dahlen, Lars Mininni, Marc Osborn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

Recent CD AFM probe developments for sub-45 nm technology nodes

Bernard Haochih Liu, Jason Osborne, Gregory A. Dahlen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

Engineering, Electrical Engineering, Instrumentation +11