Concepedia

J. Thiault

JT

3

Publications

84

Citations

3

H-Index

2005

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire des Technologies de la Microélectronique

J. Thiault is an author at Centre National de la Recherche Scientifique specializing in microfabrication, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsMicrofabricationPhysicsMicroscopyNanotechnologyNanofabricationSurface ScienceMaterial ScienceMicroelectronics

Publications per year

2005–2008

3

Publications

3

Linewidth roughness transfer measured by critical dimension atomic force microscopy during plasma patterning of polysilicon gate transistors

E. Pargon, M. Martin, J. Thiault et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 42 citations

Engineering, Microscopy, Linewidth Roughness Transfer +21

Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes

J. Thiault, J. Foucher, J.H. Tortai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 31 citations

Engineering, Electron-beam Lithography, Microscopy +22

Hybrid lithography process for nano-scale devices

S. Pauliac, S. Landis, J. Foucher et al. · Microelectronic Engineering · 2006 · 11 citations

Materials Science, Wafer Scale Processing, Engineering +9

Rows per page

1–3 of 3