J. Thiault - Concepedia

Author

J. Thiault

Also Known As

J. Thiault, THIAULT, Jérôme, Thiault, J.

Publications

Citations

H-Index

Concepts

All Affiliations

J. Thiault is an author at Centre National de la Recherche Scientifique specializing in microfabrication, applied physics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	84
2	Applied Physics	3	3	84
3	Electrical Engineering	2	2	73
4	Materials Science	2	2	42
5	Physics	2	2	73

J. Thiault

Publications

Citations

H-Index

Page 1

	Year	Citations
Linewidth roughness transfer measured by critical dimension atomic force microscopy during plasma patterning of polysilicon gate transistors E. Pargon, M. Martin, J. Thiault, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringMicroscopyLinewidth Roughness TransferPolysilicon Transistor GatesIntegrated Circuits	2008	42
Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes J. Thiault, J. Foucher, J.H. Tortai, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyMicroscopySilicon On InsulatorNanotribology	2005	31
Hybrid lithography process for nano-scale devices S. Pauliac, S. Landis, J. Foucher, Microelectronic Engineering Materials ScienceWafer Scale ProcessingEngineeringNanoengineeringBeam Lithography	2006	11

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