Concepedia

Erwine Pargon

EP

Statistics

Publications

3

Citations

233

H-Index

3

Active since

2005

Affiliations

Applied Materials (United States)(Current)

Centre National de la Recherche Scientifique

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

CEA Grenoble

Erwine Pargon is an author at Applied Materials (United States) specializing in plasma etching, physics, and engineering.

Publications per year

2005–2012

3

Publications

3

Pulsed high-density plasmas for advanced dry etching processes

S. Banna, Ankur Agarwal, Gilles Cunge et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 186 citations · Full text

, , +9

Silicon recess minimization during gate patterning using synchronous plasma pulsing

Camille Petit-Étienne, Erwine Pargon, Sylvain David et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 26 citations

, , +15

Mass spectrometry studies of resist trimming processes in HBr∕O2 and Cl2∕O2 chemistries

Erwine Pargon, O. Joubert, T. Chevolleau et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 21 citations · Full text

, , +15

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