T. Chevolleau

Spectroellipsometric, AFM and XPS probing of stainless steel surfaces subjected to biological influences

M. Vinnichenko, T. Chevolleau, M.T. Pham et al. · Applied Surface Science · 2002 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +16

Etching of Si at low temperatures using a SF6 reactive ion beam: Effect of the ion energy and current density

T. Chevolleau, Pierre‐Yves Tessier, Christophe Cardinaud et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 28 citations

Natural Sciences, Materials Science, Physics +13

An XPS study of the SF6 reactive ion beam etching of silicon at low temperatures

Pierre‐Yves Tessier, T. Chevolleau, Christophe Cardinaud et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +12

In situ ellipsometric investigation of stainless steel corrosion behavior in buffered solutions with amino acids

M. Vinnichenko, M.T. Pham, T. Chevolleau et al. · Applied Surface Science · 2003 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +13

Effect of Cl2- and HBr-based inductively coupled plasma etching on InP surface composition analyzed using <i>in situ</i> x-ray photoelectron spectroscopy

S. Bouchoule, L. Vallier, G. Patriarche et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 21 citations

Engineering, Materials Engineering, Materials Science +17