Concepedia

L. Vallier

LV

Statistics

Publications

3

Citations

51

H-Index

3

Active since

2000

Affiliations

CEA Grenoble(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

L. Vallier is an author at CEA Grenoble specializing in surface science, materials engineering, and materials science.

Publications per year

2000–2012

3

Publications

3

Effect of Cl2- and HBr-based inductively coupled plasma etching on InP surface composition analyzed using <i>in situ</i> x-ray photoelectron spectroscopy

S. Bouchoule, L. Vallier, G. Patriarche et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 21 citations

, , +17

Oxide nanodots and ultrathin layers fabricated on silicon using nonfocused multicharged ion beams

G. Borsoni, M. Gros‐Jean, Michael L. Korwin-Pawlowski et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 19 citations

, , +17

Ultrathin SiO2 layers formation by ultraslow single- and multicharged ions

G. Borsoni, Vincent Le Roux, R. Laffitte et al. · Solid-State Electronics · 2002 · 11 citations

, , +6

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