Concepedia

Ankur Agarwal

AA

Statistics

Publications

1

Citations

186

H-Index

1

Active since

2012

Affiliations

Centre National de la Recherche Scientifique(Current)

Ankur Agarwal is an author at Centre National de la Recherche Scientifique specializing in microelectronics, physics, and plasma etching.

Publications per year

2012–2012

1

Publications

1

Pulsed high-density plasmas for advanced dry etching processes

S. Banna, Ankur Agarwal, Gilles Cunge et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 186 citations · Full text

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