Statistics
Publications
47
Citations
1.2K
H-Index
20
Active since
2005
Maxime Darnon is an author at Centre National de la Recherche Scientifique specializing in semiconductor devices, materials science, and materials engineering.
Publications per year
2005–2023
47
47
Mechanisms of porous dielectric film modification induced by reducing and oxidizing ash plasmas
N. Possémé, T. Chevolleau, Maxime Darnon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 78 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing
Camille Petit-Étienne, Maxime Darnon, Laurent Vallier et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 74 citations · Full text
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