Statistics
Publications
37
Citations
1K
H-Index
19
Active since
2003
T. Chevolleau is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in materials science, materials engineering, and natural sciences.
Publications per year
2003–2020
37
37
15nm-diameter 3D stacked nanowires with independent gates operation: ΦFET
C. Dupré, A. Hubert, Stéphane Bécu et al. · 2008 · 111 citations
Mechanisms of porous dielectric film modification induced by reducing and oxidizing ash plasmas
N. Possémé, T. Chevolleau, Maxime Darnon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 78 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Etching of porous SiOCH materials in fluorocarbon-based plasmas
N. Possémé, T. Chevolleau, O. Joubert et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 52 citations
Natural Sciences, Materials Engineering, Materials Science +17
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