Concepedia

M. Kogelschatz

MK

14

Publications

380

Citations

12

H-Index

2004

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Laboratoire des Technologies de la Microélectronique

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

CEA Grenoble

Laboratoire d'Électronique des Technologies de l'Information

M. Kogelschatz is an author at Centre National de la Recherche Scientifique specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

2004–2024

14

Publications

14

Plasma–wall interactions during silicon etching processes in high-density HBr/Cl<sub>2</sub>/O<sub>2</sub>plasmas

Gilles Cunge, M. Kogelschatz, O. Joubert et al. · Plasma Sources Science and Technology · 2005 · 52 citations

Identification of halogen containing radicals in silicon etching plasmas and density measurement by UV broad band absorption spectroscopy

M. Kogelschatz, Gilles Cunge, Nader Sadeghi · Journal of Physics D Applied Physics · 2004 · 48 citations

Analysis of the chemical composition and deposition mechanism of the SiOx–Cly layer on the plasma chamber walls during silicon gate etching

M. Kogelschatz, Gilles Cunge, Nader Sadeghi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 39 citations · Full text

, , +12

Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G. Cunge, M. Kogelschatz, N. Sadeghi · Plasma Sources Science and Technology · 2004 · 38 citations

, , +14

Self-assembled block polymer templates as high resolution lithographic masks

Karim Aissou, M. Kogelschatz, T. Baron et al. · Surface Science · 2007 · 37 citations

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