Concepedia

Keren J. Kanarik

KJ

13

Publications

1.6K

Citations

13

H-Index

2014

Active since

Affiliations

Lam Research (United States)(Current)

Samsung (South Korea)

Centre National de la Recherche Scientifique

Nagoya University

University of Maryland, College Park

Keren J. Kanarik is an author at Lam Research (United States) specializing in engineering, materials science, and applied physics.

ORCID

Top concepts

Publications per year

2014–2024

13

Publications

13

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 576 citations · Full text

, , +17

Atomic Layer Etching: Rethinking the Art of Etch

Keren J. Kanarik, Samantha Tan, Richard A. Gottscho · The Journal of Physical Chemistry Letters · 2018 · 210 citations · Full text

, , +16

The grand challenges of plasma etching: a manufacturing perspective

Chris G N Lee, Keren J. Kanarik, Richard A. Gottscho · Journal of Physics D Applied Physics · 2014 · 172 citations

, , +22

Predicting synergy in atomic layer etching

Keren J. Kanarik, Samantha Tan, Wenbing Yang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 116 citations · Full text

, , +13

Future of plasma etching for microelectronics: Challenges and opportunities

G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 103 citations · Full text

, , +14

Rows per page

1–5 of 13