Concepedia

Samantha Tan

ST

Statistics

Publications

14

Citations

1.3K

H-Index

12

Active since

1993

Affiliations

Lam Research (United States)(Current)

Samantha Tan is an author at Lam Research (United States) specializing in materials science, etching processes, and materials engineering.

Publications per year

1993–2024

14

Publications

14

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 604 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Atomic Layer Etching: Rethinking the Art of Etch

Keren J. Kanarik, Samantha Tan, Richard A. Gottscho · The Journal of Physical Chemistry Letters · 2018 · 232 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Predicting synergy in atomic layer etching

Keren J. Kanarik, Samantha Tan, Wenbing Yang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 124 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

The World Café in Singapore

Samantha Tan, Juanita Brown · The Journal of Applied Behavioral Science · 2005 · 94 citations

Social Sciences, Communication, Cultural Studies +10

Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach

T. Ohba, Wenbing Yang, Samantha Tan et al. · Japanese Journal of Applied Physics · 2017 · 75 citations

Engineering, Materials Engineering, Materials Science +17

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