Concepedia

Philip W. Barth

PW

3

Publications

398

Citations

3

H-Index

1990

Active since

Affiliations

Los Angeles Mission College(Current)

Philip W. Barth is an author at Los Angeles Mission College specializing in engineering, microfabrication, and microelectronics.

Top concepts

EngineeringMicroelectronicsMicrofabricationApplied PhysicsInstrumentationMaterial ScienceSensor TechnologySensorsVibrationMechatronics

Publications per year

1990–2003

3

Publications

3

Silicon fusion bonding for fabrication of sensors, actuators and microstructures

Philip W. Barth · Sensors and Actuators A Physical · 1990 · 174 citations

Materials Science, Engineering, Soft Robotics +7

Silicon fusion bonding for pressure sensors

K. Petersen, Philip W. Barth, J. Poydock et al. · 2003 · 130 citations

Novel Processes, Engineering, Silicon Fusion Bonding +21

A monolithic silicon accelerometer with integral air damping and overrange protection

Philip W. Barth, F. Pourahmadi, Ralph Mayer et al. · 2003 · 94 citations

Monolithic Silicon Accelerometer, Engineering, Mechanical Engineering +21

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