Statistics
Publications
45
Citations
2.7K
H-Index
24
Active since
1988
Affiliations
S. Bouwstra is an author at Technical University of Denmark specializing in engineering, materials science, and microfabrication.
Publications per year
1988–2020
45
45
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text
Engineering, Mechanical Engineering, Microelectromechanical Systems +16
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