Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement

Formation of silicon tips with <1 nm radius

R. B. Marcus, T. S. Ravi, T. J. Gmitter et al. · Applied Physics Letters · 1990 · 261 citations

Engineering, Materials Engineering, Materials Science +14

Atomic force microscopy using a piezoresistive cantilever

M. Tortonese, Hirofumi Yamada, R. C. Barrett et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 134 citations

Engineering, Electrical Engineering, Microfabrication +16

Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers

R. Linnemann, Teodor Gotszalk, Ivo W. Rangelow et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 100 citations · Full text

Engineering, Materials Engineering, Materials Science +17

AFM probes with directly fabricated tips

Anja Boisen, Ole Hansen, S. Bouwstra · Journal of Micromechanics and Microengineering · 1996 · 88 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +8

Noise in piezoresistive atomic force microscopy

Ole Hansen, Anja Boisen · Nanotechnology · 1999 · 65 citations

Engineering, Mechanical Engineering, Physics +16