Concepedia

Ivo W. Rangelow

IW

Statistics

Publications

165

Citations

4.9K

H-Index

35

Active since

1985

Affiliations

Technische Universität Ilmenau(Current)

University of Kassel

Wrocław University of Science and Technology

Lawrence Berkeley National Laboratory

Institute of Electron Technology

Ivo W. Rangelow is an author at Technische Universität Ilmenau specializing in engineering, materials science, and microelectromechanical systems.

Publications per year

1985–2022

165

Publications

165

Components for high speed atomic force microscopy

Georg E. Fantner, Georg Schitter, Johannes H. Kindt et al. · Ultramicroscopy · 2006 · 237 citations · Full text

Natural Sciences, Materials Science, Physics +9

Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems

Ivo W. Rangelow · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 198 citations

Engineering, Materials Engineering, Materials Science +17

Electrostatically driven microgripper

B. Volland, H. Heerlein, Ivo W. Rangelow · Microelectronic Engineering · 2002 · 124 citations

Nanoscale Engineering and Optical Addressing of Single Spins in Diamond

Sébastien Pezzagna, Dominik Wildanger, Paul Mazarov et al. · Small · 2010 · 122 citations

Natural Sciences, Materials Science, Physics +15

Piezoresistive sensors for scanning probe microscopy

Teodor Gotszalk, P. Grabiec, Ivo W. Rangelow · Ultramicroscopy · 2000 · 113 citations

Engineering, Materials Engineering, Materials Science +14

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