Electrostatically driven microgripper

Surface micromachining for microsensors and microactuators

Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 255 citations

Engineering, Materials Engineering, Materials Science +17

Surface micromachined microengine

Ernest J. Garcia, Jeffry J. Sniegowski · Sensors and Actuators A Physical · 1995 · 189 citations

A RIE process for submicron, silicon electromechanical structures

Z L Zhang, Noel C. MacDonald · Journal of Micromechanics and Microengineering · 1992 · 96 citations

Engineering, Materials Engineering, Materials Science +17

Micromechanical comb actuators with low driving voltage

V.P. Jaecklin, Christian Linder, N. F. de Rooij et al. · Journal of Micromechanics and Microengineering · 1992 · 83 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +12

Dry etching with gas chopping without rippled sidewalls

B. Volland, Frank F. Shi, P. Hudek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 59 citations

Engineering, Materials Engineering, Materials Science +14