H. Heerlein

Electrostatically driven microgripper

B. Volland, H. Heerlein, Ivo W. Rangelow · Microelectronic Engineering · 2002 · 124 citations

Electrical Engineering, Energy Harvesting, Engineering +4

Dry etching with gas chopping without rippled sidewalls

B. Volland, Frank F. Shi, P. Hudek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 59 citations

Materials Science, Engineering, Microfabrication +14

Design and fabrication of an electrostatically driven microgripper for blood vessel manipulation

Rafał Wierzbicki, Keith Houston, H. Heerlein et al. · Microelectronic Engineering · 2006 · 50 citations

Engineering, Soft Robotics, Microfabrication +8

The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS

B. Volland, H. Heerlein, I. Kostič et al. · Microelectronic Engineering · 2001 · 29 citations

Materials Science, Wafer Scale Processing, Engineering +8

Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

W. Barth, T. Dębski, N. Abedinov et al. · Microelectronic Engineering · 2001 · 16 citations

Afm Array, Engineering, Sensor Array +4