Concepedia

Author

H. Heerlein

University of Kassel

Also Known As

H. Heerlein, Holger Heerlein

10

Publications

321

Citations

8

H-Index

28

Concepts

All Affiliations

University of Kassel
HH

About

H. Heerlein is an author at University of Kassel specializing in engineering, microfabrication, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

303

2

Applied Physics

4

4

113

3

Natural Sciences

1

1

12

4

Biomedical Engineering

1

1

50

5

Electrical Engineering

1

1

124

H. Heerlein

×

7

Publications

303

Citations

7

H-Index

YearCitations

Electrostatically driven microgripper

B. Volland, H. Heerlein, Ivo W. Rangelow

Microelectronic Engineering

2002

124

Dry etching with gas chopping without rippled sidewalls

B. Volland, Frank F. Shi, P. Hudek,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1999

59

Design and fabrication of an electrostatically driven microgripper for blood vessel manipulation

Rafał Wierzbicki, Keith Houston, H. Heerlein,

Microelectronic Engineering

2006

50

The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS

B. Volland, H. Heerlein, I. Kostič,

Microelectronic Engineering

2001

29

Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

W. Barth, T. Dębski, N. Abedinov,

Microelectronic Engineering

2001

16

Amorphous silicon position sensitive detectors applied to micropositioning

Juan Pablo Contreras, Catarina Baptista, I. Ferreira,

Journal of Non-Crystalline Solids

2006

13

Experimental results of the stochastic Coulomb interaction in ion projection lithography

P.W.H. de Jager, G. Derksen, B. Mertens,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1999

12

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