Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Piezoresistive sensors for scanning probe microscopy

Teodor Gotszalk, P. Grabiec, Ivo W. Rangelow · Ultramicroscopy · 2000 · 113 citations

Engineering, Materials Engineering, Materials Science +14

Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers

R. Linnemann, Teodor Gotszalk, Ivo W. Rangelow et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 100 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Dry etching with gas chopping without rippled sidewalls

B. Volland, Frank F. Shi, P. Hudek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 59 citations

Engineering, Materials Engineering, Materials Science +14

Plasma etching for micromechanical sensor applications

Ivo W. Rangelow, S. Skocki, P. Dumania · Microelectronic Engineering · 1994 · 32 citations

Engineering, Electrical Engineering, Physics +12

<title>Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip</title>

Ivo W. Rangelow, Feng Shi, P. Hudek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 31 citations

Engineering, Materials Engineering, Materials Science +17