Feng Shi

<title>Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip</title>

Ivo W. Rangelow, Feng Shi, P. Hudek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 31 citations

Engineering, Integrated Tip, Mechanical Engineering +16

Detailed near-surface nanoscale damage precursor measurement and characterization of fused silica optics assisted by ion beam etching

Yaoyu Zhong, Feng Shi, Ye Tian et al. · Optics Express · 2019 · 28 citations · Full text

Optical Materials, Engineering, Microscopy +23

PN and SOI wafer flow process for stencil mask fabrication

Joerg Butschke, Albrecht Ehrmann, E. Haugeneder et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 13 citations

Materials Science, Wafer Scale Processing, Engineering +14

Synthesis and Characterization of <i>β</i>-Ga₂O₃ Nanorod Array Clumps by Chemical Vapor Deposition

Feng Shi, Xiaofeng Wei · Journal of Nanoscience and Nanotechnology · 2012 · 12 citations

Materials Science, Nanocrystalline Material, Chemical Engineering +14

Design of arrayed magnetorheological equipment applied in optics manufacture

Wanli Zhang, Feng Shi, Ci Song et al. · Optics & Laser Technology · 2022 · 10 citations · Full text

Magnetism, Removal Function, Engineering +11