Statistics
Publications
10
Citations
232
H-Index
10
Active since
1998
Joerg Butschke is an author at Institut für Mikroelektronik Stuttgart specializing in engineering, microelectronics, and microfabrication.
Publications per year
1998–2011
10
10
SOI wafer flow process for stencil mask fabrication
Joerg Butschke, Albrecht Ehrmann, B. Höfflinger et al. · Microelectronic Engineering · 1999 · 26 citations
1–5 of 10