Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

R. Pedrak, Tzv. Ivanov, K. Ivanova, +7

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringMicroscopyMechanical EngineeringForce MicroscopyBiomedical Engineering +20

A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout

Christian Riesch, Erwin K. Reichel, A. Jachimowicz, +4

Journal of Micromechanics and Microengineering

EngineeringMechanical EngineeringDevice DesignerAcoustic SensorSensor Technology +17

Dry etching with gas chopping without rippled sidewalls

B. Volland, Frank F. Shi, P. Hudek, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Materials ScienceEngineeringMicrofabricationMaterials FabricationSidewall Surface +12

Bulk micromachining of SiC substrate for MEMS sensor applications

G. Vanko, P. Hudek, Johann Zehetner, +6

Microelectronic Engineering

Electrical EngineeringEngineeringMicromachinesMicrofabricationBulk Micromachining +3

Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

M. Jergel, Tilo Baumbach, E. Majková, +6

Journal of Physics D Applied Physics

Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device

T. Lalinský, P. Hudek, G. Vanko, +8

Microelectronic Engineering

Electrical EngineeringBiomedical SensorsEngineeringMembrane StructuresMicrofabrication +7

<title>Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip</title>

Ivo W. Rangelow, Feng Shi, P. Hudek, +3

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringIntegrated TipMechanical EngineeringSurface MicromachiningEducation +14

Exposure optimization in high-resolution e-beam lithography

P. Hudek, Dirk Beyer

Microelectronic Engineering

EngineeringBeam LithographyElectron-beam LithographyMicroscopyTarget Fabrication +6

Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy

Teodor Gotszalk, J. Radojewski, P. Grabiec, +4

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringMicroscopyMechanical EngineeringMicro-electromechanical SystemMicromachines +16

Micromachined ultrasharp silicon and diamond-coated silicon tip as a stable field-emission electron source and a scanning probe microscopy sensor with atomic sharpness

Ivo W. Rangelow, F.G. Shi, P. Hudek, +6

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringElectron-beam LithographyMicroscopySemiconductorsElectronic Devices +21