P. Hudek

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

R. Pedrak, Tzv. Ivanov, K. Ivanova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 108 citations

Engineering, Microscopy, Mechanical Engineering +22

A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout

Christian Riesch, Erwin K. Reichel, A. Jachimowicz et al. · Journal of Micromechanics and Microengineering · 2009 · 60 citations

Engineering, Mechanical Engineering, Device Designer +19

Dry etching with gas chopping without rippled sidewalls

B. Volland, Frank F. Shi, P. Hudek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 59 citations

Materials Science, Engineering, Microfabrication +14

Bulk micromachining of SiC substrate for MEMS sensor applications

G. Vanko, P. Hudek, Johann Zehetner et al. · Microelectronic Engineering · 2013 · 39 citations

Electrical Engineering, Engineering, Micromachines +5

Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

M. Jergel, Tilo Baumbach, E. Majková et al. · Journal of Physics D Applied Physics · 2001 · 34 citations