Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

Abstract

Structural characterization of a fully etched amorpous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theroy for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.