Concepedia

R. Pedrak

RP

Statistics

Publications

1

Citations

108

H-Index

1

Active since

2003

Affiliations

Vistec Electron Beam (Germany)(Current)

R. Pedrak is an author at Vistec Electron Beam (Germany) specializing in mechanical engineering, scanning probe microscopy, and bimorph thermal actuators.

Publications per year

2003–2003

1

Publications

1

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

R. Pedrak, Tzv. Ivanov, K. Ivanova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 108 citations

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