Tzv. Ivanov

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

R. Pedrak, Tzv. Ivanov, K. Ivanova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 108 citations

Engineering, Materials Science, Mechanical Engineering +17

Thermally driven micromechanical beam with piezoresistive deflection readout

Tzv. Ivanov, Teodor Gotszalk, P. Grabiec et al. · Microelectronic Engineering · 2003 · 55 citations

Engineering, Mechanical Engineering, Physics +14

Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Ivo W. Rangelow, Tzv. Ivanov, K. Ivanova et al. · Microelectronic Engineering · 2007 · 49 citations

Engineering, Materials Science, Mechanical Engineering +14

Scanning proximal probes for parallel imaging and lithography

K. Ivanova, Y. Sarov, Tzv. Ivanov et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 49 citations

Engineering, Electrical Engineering, Actuators +8

Quantum size aspects of the piezoresistive effect in ultra thin piezoresistors

Tzv. Ivanov, Teodor Gotszalk, T. Sulzbach et al. · Ultramicroscopy · 2003 · 42 citations

Natural Sciences, Materials Science, Physics +12