Teodor Gotszalk

Piezoresistive sensors for scanning probe microscopy

Teodor Gotszalk, P. Grabiec, Ivo W. Rangelow · Ultramicroscopy · 2000 · 113 citations

Engineering, Materials Engineering, Materials Science +14

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

R. Pedrak, Tzv. Ivanov, K. Ivanova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 108 citations

Engineering, Materials Science, Mechanical Engineering +17

Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers

R. Linnemann, Teodor Gotszalk, Ivo W. Rangelow et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 100 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection

N. Abedinov, P. Grabiec, Teodor Gotszalk et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 81 citations

Engineering, Materials Engineering, Materials Science +16

Characterization of a cantilever with an integrated deflection sensor

R. Linnemann, Teodor Gotszalk, Lubomir M. Hadjiiski et al. · Thin Solid Films · 1995 · 77 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +10