N. Abedinov

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

R. Pedrak, Tzv. Ivanov, K. Ivanova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 108 citations

Engineering, Materials Science, Mechanical Engineering +17

Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection

N. Abedinov, P. Grabiec, Teodor Gotszalk et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 81 citations

Engineering, Materials Engineering, Materials Science +16

Thermal nano-probe

Ivo W. Rangelow, Teodor Gotszalk, P. Grabiec et al. · Microelectronic Engineering · 2001 · 61 citations

Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films

L. Zambov, Cyril Popov, N. Abedinov et al. · Advanced Materials · 2000 · 56 citations

Engineering, Materials Engineering, Materials Science +14

SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis

P. Grabiec, Teodor Gotszalk, J. Radojewski et al. · Microelectronic Engineering · 2002 · 35 citations

Engineering, Materials Engineering, Materials Science +15