R. Linnemann

Robust design of gas and liquid micropumps

Martin Richter, R. Linnemann, Peter Woias · Sensors and Actuators A Physical · 1998 · 142 citations

Engineering, Microfabrication, Fluid Mechanics +5

Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers

R. Linnemann, Teodor Gotszalk, Ivo W. Rangelow et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 100 citations · Full text

Atomic Force Microscopy, Engineering, Microscopy +18

A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases

R. Linnemann, Peter Woias, C.-D. Senfft et al. · 1998 · 100 citations

Pump Diaphragm Displacement, Engineering, Flow Control +13

Characterization of a cantilever with an integrated deflection sensor

R. Linnemann, Teodor Gotszalk, Lubomir M. Hadjiiski et al. · Thin Solid Films · 1995 · 77 citations

Engineering, Mechanical Engineering, Integrated Deflection Sensor +5

AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode

Teodor Gotszalk, R. Linnemann, Ivo W. Rangelow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 11 citations

Sensitive Instrument, Engineering, Microscopy +21