Concepedia

Bulk micromachining of SiC substrate for MEMS sensor applications

G. Vanko, P. Hudek, Johann Zehetner, J. Dzuba, Pavlina Choleva, Vladimı́r Kutiš, Martin Vallo, Ivan Rýger, T. Lalinský

Microelectronic Engineering · 2013 · 41 citations · 20 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSensorsBulk MicromachiningMems FabricationMems MaterialsMems SensorsMicroelectromechanical SensorsMicromachiningMems Mechanical SensorsMicroelectromechanical Sensor MaterialsMicroelectromechanical System FabricationMicrofabricated SensorsMicromachined SensorsSensor ApplicationsSilicon Microstructures

References

20

Growth and applications of Group III-nitrides

O. Ambacher · Journal of Physics D Applied Physics · 1998 · 1.4K citations

Engineering, Materials Engineering, Materials Science +17

Substrates for gallium nitride epitaxy

L. Liu, James H. Edgar · Materials Science and Engineering R Reports · 2002 · 809 citations

Engineering, Materials Engineering, Materials Science +12

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

V. Cimalla, J. Pezoldt, O. Ambacher · Journal of Physics D Applied Physics · 2007 · 386 citations

Engineering, Materials Engineering, Materials Science +17

GaN-based diodes and transistors for chemical, gas, biological and pressure sensing

S. J. Pearton, B. S. Kang, Suku Kim et al. · Journal of Physics Condensed Matter · 2004 · 300 citations

Engineering, Electrical Engineering, Materials Science +17

GaN-based heterostructures for sensor applications

M. Stutzmann, Gustav Steinhoff, Martin Eickhoff et al. · Diamond and Related Materials · 2002 · 166 citations

Engineering, Materials Engineering, Materials Science +14