Concepedia

Publication | Closed Access

Bulk micromachining of SiC substrate for MEMS sensor applications

DOI

39

Citations

20

References

2013

Year

G. Vanko, P. Hudek, Johann Zehetner, J. Dzuba, Pavlina Choleva, Vladimı́r Kutiš, Martin Vallo, Ivan Rýger, T. Lalinský
Microelectronic Engineering

References

YearCitations

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