Concepedia

Mems Sensors

MEMS Sensors is a class of microscale sensing devices that convert physical or chemical stimuli into electrical signals through integrated mechanical and electronic components fabricated using semiconductor-compatible processes.

9.2K

Publications

416.9K

Citations

26.6K

Authors

3.4K

Institutions

Publications per year

2017–2026

2.6K

Variants

Microelectromechanical Systems Sensors

Parents

Children

Publications

9.2K

Development of recommendations for SEMG sensors and sensor placement procedures

Hermie Hermens, Bart Freriks, Catherine Dißelhorst-Klug et al. · Journal of Electromyography and Kinesiology · 2000 · 6.9K citations

, , +14

Fully integrated wearable sensor arrays for multiplexed in situ perspiration analysis

Wei Gao, Sam Emaminejad, Hnin Yin Yin Nyein et al. · Nature · 2016 · 4.9K citations · Full text

, , +14

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

, , +13

Micromachined inertial sensors

N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations

, , +17

Metal oxide-based gas sensor research: How to?

Nicolae Bârsan, Dorota Koziej, Udo Weimar · Sensors and Actuators B Chemical · 2006 · 1.7K citations

, , +12

1–5 of 9.2K

Authors

26.6K

  1. ZL
    Zhong Lin Wang

    Georgia Institute of Technology, United States

    37 publications · 6.2K citations

    32

    h-index

  2. XL
    Xinxin Li

    Shanghai Institute of Microsystem and Information Technology, China

    62 publications · 2.3K citations

    30

    h-index

  3. TT
    Thomas Thundat

    Oak Ridge National Laboratory, United States

    41 publications · 3.6K citations

    29

    h-index

  4. AA
    Ashwin A. Seshia

    University of Cambridge, United Kingdom

    44 publications · 2.2K citations

    28

    h-index

  5. HB
    H. Baltes

    ETH Zurich, Switzerland

    50 publications · 2.6K citations

    26

    h-index

1–5 of 26.6K

Institutions

3.4K

  1. Chinese Academy of Sciences

    Beijing, China

    59 h-index

    1.4K publications

    75.1K citations

  2. University of California, Berkeley

    Berkeley, United States

    56 h-index

    432 publications

    98.2K citations

  3. Georgia Institute of Technology

    Atlanta, United States

    54 h-index

    417 publications

    31.5K citations

  4. ETH Zurich

    Zurich, Switzerland

    45 h-index

    417 publications

    24.7K citations

  5. University of Michigan

    Ann Arbor, United States

    45 h-index

    500 publications

    26.3K citations

  6. Stanford University

    Stanford, United States

    44 h-index

    368 publications

    25.8K citations

  7. University of Chinese Academy of Sciences

    Beijing, China

    42 h-index

    540 publications

    26.6K citations

  8. École Polytechnique Fédérale de Lausanne

    Lausanne, Switzerland

    39 h-index

    257 publications

    12.9K citations

1–8 of 3.4K

Venues

  1. Sensors and Actuators B Chemical

    632 publications · 33.9K citations

    90

    h-index

  2. Sensors and Actuators A Physical

    777 publications · 35.6K citations

    86

    h-index

  3. Journal of Microelectromechanical Systems

    309 publications · 16.2K citations

    67

    h-index

  4. IEEE Sensors Journal

    422 publications · 17.4K citations

    63

    h-index

  5. Journal of Micromechanics and Microengineering

    JMM · 330 publications · 14.4K citations

    60

    h-index

1–5