Microelectronic Engineering · 2006 · 50 citations · 5 references
EngineeringBioengineeringBiomedical EngineeringBiomemsMicroelectromechanical SystemsMicrofabricationElectrostatic ActuationElectrostatic ActuatorsMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsElectrostatic MicrogrippersMicrogripper DesignMicrogrippers
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Electrostatically driven microgripper
B. Volland, H. Heerlein, Ivo W. Rangelow · Microelectronic Engineering · 2002 · 124 citations