Surface micromachining for microsensors and microactuators

Abstract

Micromechanical structures can be made by selectively etching sacrificial layers from a multilayer sandwich of patterned thin films. This paper reviews this technology, termed surface micromachining, with an emphasis on polysilicon microstructures. Micromechanical characteristics of thin-film microstructures critically depend on the average residual stress in the film, as well as on the stress variation in the direction of deposition. The stress in low-pressure chemical vapor deposition polysilicon varies with deposition temperature, doping, and annealing cycles. Applications of surface micromachining to fabricate beams, plates, sealed cavities, and linear and rotary bearings are discussed.