N. F. de Rooij

Study of electrochemical etch-stop for high-precision thickness control of silicon membranes

B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations

Materials Science, Single-crystal Silicon Membranes, Membrane Technology +12

Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors

Nicolas Blanc, Juergen Brügger, N. F. de Rooij et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 111 citations · Full text

Dynamic Mode, Capacitive Sensors, Engineering +18

Integrated array sensor for detecting organic solvents

Julian W. Gardner, Alex Pike, N. F. de Rooij et al. · Sensors and Actuators B Chemical · 1995 · 90 citations · Full text

Chemical Engineering, Engineering, Sensors +6

Micromechanical comb actuators with low driving voltage

V.P. Jaecklin, Christian Linder, N. F. de Rooij et al. · Journal of Micromechanics and Microengineering · 1992 · 83 citations · Full text

Engineering, Mechanical Engineering, Submicrometer-wide Suspensions +16

Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

Genki Yoshikawa, Terunobu Akiyama, Frédéric Loizeau et al. · Sensors · 2012 · 73 citations · Full text

Materials Science, Improved Sensitivity, Dimensional Array +15