B. Kloeck

Study of electrochemical etch-stop for high-precision thickness control of silicon membranes

B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations

Engineering, Materials Engineering, Materials Science +17

The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source

Henri Jansen, M. de Boer, H. Wensink et al. · Microelectronics Journal · 2001 · 92 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Prototype structure for systematic investigations of thin-film gas sensors

Klaus Schierbaum, S. Vaihinger, W. Göpel et al. · Sensors and Actuators B Chemical · 1990 · 71 citations

Natural Sciences, Materials Engineering, Materials Science +16

A pH-isfet and an integrated ph-pressure sensor with back-side contacts

H.H. van den Vlekkert, B. Kloeck, Den Kloeck et al. · Sensors and Actuators · 1988 · 51 citations

Engineering, Electrical Engineering, Electrochemistry +8

The potential dependence of silicon anisotropic etching in KOH at 60°c

R. L. Smith, B. Kloeck, Nico de Rooij et al. · Journal of Electroanalytical Chemistry · 1987 · 46 citations · Full text

Engineering, Materials Engineering, Materials Science +12