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Engineering, Materials Engineering, Materials Science +17

Microwave Plasma Etching

Keizô Suzuki, Sadayuki Okudaira, N. Sakudo et al. · Japanese Journal of Applied Physics · 1977 · 236 citations

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Natural Sciences, Physics, Plasma Physics +16

Low-Temperature Microwave Plasma Etching of Crystalline Silicon

Kazunori Tsujimoto, Sadayuki Okudaira, S. Tachi · Japanese Journal of Applied Physics · 1991 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +15