Kazunori Tsujimoto

Low-temperature reactive ion etching and microwave plasma etching of silicon

S. Tachi, Kazunori Tsujimoto, Sadayuki Okudaira · Applied Physics Letters · 1988 · 324 citations

Materials Science, Electrical Engineering, Engineering +12

Low-temperature dry etching

S. Tachi, Kazunori Tsujimoto, Shin Arai et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 148 citations

Engineering, Plasma Processing, Highly Selective Anisotropic +16

Deposition in Dry-Etching Gas Plasmas

Shin Arai, Kazunori Tsujimoto, S. Tachi · Japanese Journal of Applied Physics · 1992 · 44 citations

Engineering, Chemistry, Plasma Processing +16

Low-Damage Damascene Patterning Using Porous Inorganic Low-Dielectric-Constant Materials

Kazumasa Yonekura, Kinya Goto, Masazumi Matsuura et al. · Japanese Journal of Applied Physics · 2005 · 43 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Low-Temperature Microwave Plasma Etching of Crystalline Silicon

Kazunori Tsujimoto, Sadayuki Okudaira, S. Tachi · Japanese Journal of Applied Physics · 1991 · 38 citations

Materials Science, Electrical Engineering, Crystalline Silicon +14