Statistics
Publications
2
Citations
197
H-Index
2
Active since
1991
Affiliations
Hitachi (Japan)(Current)
Shin Arai is an author at Hitachi (Japan) specializing in dry etching, plasma etching, and materials science.
Publications per year
1991–1992
2
2
S. Tachi, Kazunori Tsujimoto, Shin Arai et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 153 citations
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