Concepedia

Shin Arai

SA

Statistics

Publications

2

Citations

192

H-Index

2

Active since

1991

Affiliations

Hitachi (Japan)(Current)

Shin Arai is an author at Hitachi (Japan) specializing in engineering, microfabrication, and applied physics.

Top concepts

Publications per year

1991–1992

2

Publications

2

Low-temperature dry etching

S. Tachi, Kazunori Tsujimoto, Shin Arai et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 148 citations

, , +16

Deposition in Dry-Etching Gas Plasmas

Shin Arai, Kazunori Tsujimoto, S. Tachi · Japanese Journal of Applied Physics · 1992 · 44 citations

, , +16

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