S. Tachi

Low-temperature reactive ion etching and microwave plasma etching of silicon

S. Tachi, Kazunori Tsujimoto, Sadayuki Okudaira · Applied Physics Letters · 1988 · 324 citations

Materials Science, Electrical Engineering, Engineering +12

Low-temperature dry etching

S. Tachi, Kazunori Tsujimoto, Shin Arai et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 148 citations

Engineering, Plasma Processing, Highly Selective Anisotropic +16

Chemical sputtering of silicon by F+, Cl+, and Br+ ions: Reactive spot model for reactive ion etching

S. Tachi, Sadayuki Okudaira · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 104 citations

Engineering, Ev Energy Range, Integrated Circuits +18

Low-energy mass-separated ion beam deposition of materials

Takeshi Tokuyama, Kunihiro Yagi, Kiyoshi Miyake et al. · Nuclear Instruments and Methods · 1981 · 55 citations

Materials Engineering, Materials Science, Ion Implantation +4

Deposition in Dry-Etching Gas Plasmas

Shin Arai, Kazunori Tsujimoto, S. Tachi · Japanese Journal of Applied Physics · 1992 · 44 citations

Engineering, Chemistry, Plasma Processing +16