Low-energy mass-separated ion beam deposition of materials

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Natural Sciences, Physics, Atomic Physics +13

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

Natural Sciences, Materials Engineering, Thin Films +1

Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching

J. W. Coburn, Harold F. Winters · Journal of Applied Physics · 1979 · 738 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fundamentals of Ion Plating

D.M. Mattox · Journal of Vacuum Science and Technology · 1973 · 199 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reaction of fluorine atoms with SiO2

Daniel Flamm, C. J. Mogab, E. R. Sklaver · Journal of Applied Physics · 1979 · 97 citations

Natural Sciences, Chemistry, Physics +7