Concepedia

Publication | Closed Access

Low-energy mass-separated ion beam deposition of materials

DOI

55

Citations

13

References

1981

Year

Takeshi Tokuyama, Kunihiro Yagi, Kiyoshi Miyake, M. Tamura, N. Natsuaki, S. Tachi
Nuclear Instruments and Methods

References

YearCitations

Page 1