Concepedia

Harold F. Winters

HF

67

Publications

6.7K

Citations

40

H-Index

1960

Active since

Affiliations

IBM (United States)(Current)

IBM Research - Almaden

Harold F. Winters is an author at IBM (United States) specializing in engineering, applied physics, and surface science.

Top concepts

Publications per year

1960–2007

67

Publications

67

Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching

J. W. Coburn, Harold F. Winters · Journal of Applied Physics · 1979 · 723 citations

, , +13

Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters · Journal of Vacuum Science and Technology · 1979 · 593 citations

, , +16

Surface science aspects of etching reactions

Harold F. Winters, J. W. Coburn · Surface Science Reports · 1992 · 493 citations

, , +5

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 317 citations

, , +19

The etching of silicon with XeF2 vapor

Harold F. Winters, J. W. Coburn · Applied Physics Letters · 1979 · 302 citations

, , +13

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