Harold F. Winters

Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching

J. W. Coburn, Harold F. Winters · Journal of Applied Physics · 1979 · 738 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters · Journal of Vacuum Science and Technology · 1979 · 601 citations

Natural Sciences, Chemistry, Materials Science +15

Surface science aspects of etching reactions

Harold F. Winters, J. W. Coburn · Surface Science Reports · 1992 · 496 citations

Natural Sciences, Materials Engineering, Materials Science +12

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 318 citations

Natural Sciences, Materials Science, Physics +17

The etching of silicon with XeF2 vapor

Harold F. Winters, J. W. Coburn · Applied Physics Letters · 1979 · 303 citations

Engineering, Materials Engineering, Materials Science +17