Harold F. Winters - Concepedia

Author

Harold F. Winters

Also Known As

H F Winters, H. F. WINTERS, H. F. Winters, H.F. Winters, HAROLD F. WINTERS, Harold F Winters, Harold F. Winters, Harold Winters, United States., Winters, Harold F.

124

Publications

Citations

H-Index

102

Concepts

All Affiliations

IBM (United States)IBM Research - Almaden

About

Harold F. Winters is an author at IBM (United States) specializing in engineering, applied physics, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	40	65	6.6K
2	Natural Sciences	16	17	1.2K
3	Medicine	2	2	31
4	Education	1	1	72
5	Public Health	1	1	17

Harold F. Winters

Publications

6.7K

Citations

H-Index

Page 1

	Year	Citations
Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching J. W. Coburn, Harold F. Winters Journal of Applied Physics Volatile Reaction ProductsChemical EngineeringEngineeringGas-surface Chemical ReactionsPlasma Processing	1979	723
Plasma etching—A discussion of mechanisms J. W. Coburn, Harold F. Winters Journal of Vacuum Science and Technology Plasma SituationsSelective EtchingEngineeringGlow DischargePlasma Physics	1979	593
Surface science aspects of etching reactions Harold F. Winters, J. W. Coburn Surface Science Reports Materials ScienceEngineeringSurface ScienceApplied PhysicsSurface Engineering	1992	493
Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions Harold F. Winters, Peter Sigmund Journal of Applied Physics EngineeringAtomic Emission SpectroscopyVacuum DeviceChemistryLow-energy Ions	1974	317
The etching of silicon with XeF2 vapor Harold F. Winters, J. W. Coburn Applied Physics Letters Materials ScienceEngineeringPhysicsMicrofabricationLarge Selectivity	1979	302
Surface processes in plasma-assisted etching environments Harold F. Winters, J. W. Coburn, T. J. Chuang Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena EngineeringMicrofabricationMaterials FabricationPlasma-assisted Etching EnvironmentsSurface Science	1983	266
Gas Incorporation into Sputtered Films Harold F. Winters, E. Kay Journal of Applied Physics Materials ScienceMaterials EngineeringChemical EngineeringEngineeringSputtered Nickel Films	1967	233
Chemical sputtering of fluorinated silicon Yung-Yi Tu, T. J. Chuang, Harold F. Winters Physical review. B, Condensed matter Materials ScienceMaterials EngineeringChemical EngineeringEngineeringGas Phase	1981	225
Ionic Adsorption and Dissociation Cross Section for Nitrogen Harold F. Winters The Journal of Chemical Physics Inorganic ChemistryEngineeringSurface ChemistrySurface AnalysisSurface Science	1966	218
Ion-surface interactions in plasma etching J. W. Coburn, Harold F. Winters, T. J. Chuang Journal of Applied Physics Materials ScienceIon ImplantationEngineeringPhysicsIon-surface Interactions	1977	215

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