Concepedia

C. J. Mogab

CJ

Statistics

Publications

31

Citations

2.4K

H-Index

25

Active since

1968

Affiliations

Motorola (United States)(Current)

Massachusetts Institute of Technology

AT&T (United States)

Mathematical Sciences Research Institute

C. J. Mogab is an author at Motorola (United States) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceThin FilmsElectrical EngineeringMicroelectronicsMaterials EngineeringChemistryCrystalline Defects

Publications per year

1968–1995

31

Publications

31

Plasma etching of Si and SiO2—The effect of oxygen additions to CF4 plasmas

C. J. Mogab, A. C. Adams, Daniel Flamm · Journal of Applied Physics · 1978 · 561 citations

Engineering, Vacuum Device, Chemistry +17

The Loading Effect in Plasma Etching

C. J. Mogab · Journal of The Electrochemical Society · 1977 · 221 citations

Engineering, Microfabrication, Etch Rate +10

Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions

J. O. Olowolafe, Robert E. Jones, A. C. Campbell et al. · Journal of Applied Physics · 1993 · 141 citations

Engineering, Thin Film Process Technology, Chemistry +20

Conversion of Si to epitaxial SiC by reaction with C2H2

C. J. Mogab, H. J. Leamy · Journal of Applied Physics · 1974 · 137 citations

Semiconductors, Materials Science, Engineering +14

Anisotropic plasma etching of polysilicon

C. J. Mogab, H. J. Levinstein · Journal of Vacuum Science and Technology · 1980 · 136 citations

Materials Science, Materials Engineering, Electrical Engineering +15

1–5 of 31