Concepedia
Statistics
Publications
55
Citations
1.8K
H-Index
26
Active since
1969
Affiliations
Hitachi (Japan)(Current)
Furukawa Electric (Japan)
Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional
M. Tamura is an author at Hitachi (Japan) specializing in materials science, materials engineering, and electronic materials.
Publications per year
1969–2002
Si Bridging Epitaxy from Si Windows onto SiO<sub>2</sub>by<i>Q</i>-Switched Ruby Laser Pulse Annealing
M. Tamura, Hiroshi Tamura, Takeshi Tokuyama · Japanese Journal of Applied Physics · 1980 · 98 citations
Natural Sciences, Materials Engineering, Materials Science +17
MeV-ion-induced damage in Si and its annealing
M. Tamura, Toshio Ando, K. Ohyu · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 95 citations
Engineering, Materials Science, Physics +12
MeV-energy B+, P+ and As+ ion implantation into Si
M. Tamura, N. Natsuaki, Yasuo Wada et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 95 citations
Engineering, Materials Science, Physics +11
Lateral solid phase epitaxy of amorphous Si films on Si substrates with SiO2 patterns
Hiroshi Ishiwara, Hiroshi Yamamoto, Seijiro Furukawa et al. · Applied Physics Letters · 1983 · 76 citations
Generation of Dislocations Induced by Chemical Vapor Deposited Si<sub>3</sub>N<sub>4</sub>Films on Silicon
M. Tamura, Hideo Sunami · Japanese Journal of Applied Physics · 1972 · 64 citations
Engineering, Materials Engineering, Materials Science +17
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