Statistics
Publications
10
Citations
916
H-Index
10
Active since
1970
Affiliations
Sadayuki Okudaira is an author at Hitachi (Japan) specializing in etching, etching processes, and plasma etching.
Publications per year
1970–1991
10
10
Keizô Suzuki, Sadayuki Okudaira, N. Sakudo et al. · Japanese Journal of Applied Physics · 1977 · 236 citations
1–5 of 10