Concepedia

Shigeru Nishimatsu

SN

22

Publications

1K

Citations

16

H-Index

1977

Active since

Affiliations

Hitachi (Japan)(Current)

Shigeru Nishimatsu is an author at Hitachi (Japan) specializing in applied physics, engineering, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsPhysicsSurface ScienceMaterial ScienceElectrical EngineeringMicrofabricationOptoelectronicsAtomic Physics

Publications per year

1977–1991

22

Publications

22

Grain Growth Mechanism of Heavily Phosphorus‐Implanted Polycrystalline Silicon

Yasuo Wada, Shigeru Nishimatsu · Journal of The Electrochemical Society · 1978 · 246 citations

Materials Science, Semiconductors, Engineering +11

Radiation Damage in SiO<sub>2</sub>/Si Induced by VUV Photons

Takashi Yunogami, Tatsumi Mizutani, Keizô Suzuki et al. · Japanese Journal of Applied Physics · 1989 · 132 citations

Semiconductors, Sio 2, Semiconductor Technology +12

Ac Surface Photovoltages in Strongly-Inverted Oxidized p-Type Silicon Wafers<sup>*</sup>

Chusuke Munakata, Shigeru Nishimatsu, Noriaki Honma et al. · Japanese Journal of Applied Physics · 1984 · 87 citations

Electrical Engineering, Semiconductor Device, Engineering +14

Reaction of atomic fluorine with silicon

Ken Ninomiya, Keizô Suzuki, Shigeru Nishimatsu et al. · Journal of Applied Physics · 1985 · 72 citations

Chemical Engineering, Engineering, Nanotechnology +15

Analysis of ac Surface Photovoltages in a Depleted Oxidized p-Type Silicon Wafer

Chusuke Munakata, Shigeru Nishimatsu · Japanese Journal of Applied Physics · 1986 · 61 citations

Electrical Engineering, Engineering, Applied Physics +11

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