Concepedia

Tatsumi Mizutani

TM

Statistics

Publications

17

Citations

511

H-Index

13

Active since

1974

Affiliations

Hitachi (Japan)(Current)

Tatsumi Mizutani is an author at Hitachi (Japan) specializing in applied physics, engineering, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsMaterial ScienceElectrical EngineeringMicroelectronicsOptoelectronicsMicrofabricationAtomic PhysicsSemiconductors

Publications per year

1974–1999

17

Publications

17

Radiation Damage in SiO<sub>2</sub>/Si Induced by VUV Photons

Takashi Yunogami, Tatsumi Mizutani, Keizô Suzuki et al. · Japanese Journal of Applied Physics · 1989 · 132 citations

Semiconductors, Sio 2, Semiconductor Technology +12

Sputtering yield and radiation damage by neutral beam bombardment

Tatsumi Mizutani, Shigeru Nishimatsu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 52 citations

Electrical Engineering, Ion Implantation, Engineering +13

Development of neutral-beam-assisted etcher

Takashi Yunogami, Ken’etsu Yokogawa, Tatsumi Mizutani · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 39 citations

Electrical Engineering, Neutral-beam-assisted Etcher, Engineering +14

Positive Charges and E' Centers Formed by Vacuum Ultraviolet Radiation in SiO<sub>2</sub> Grown on Si

Ken’etsu Yokogawa, Yusuke Yajima, Tatsumi Mizutani et al. · Japanese Journal of Applied Physics · 1990 · 38 citations

Engineering, Optoelectronic Devices, Integrated Circuits +17

Mechanism of Radiation Damage in SiO<sub>2</sub>/Si Induced by vuv Photons

Takashi Yunogami, Tatsumi Mizutani, Kazunori Tsujimoto et al. · Japanese Journal of Applied Physics · 1990 · 36 citations

Engineering, Radiation Effect, Generation Yield +17

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