Statistics
Publications
9
Citations
359
H-Index
9
Active since
1988
Affiliations
Hitachi (Japan)(Current)
Takashi Yunogami is an author at Hitachi (Japan) specializing in materials science, electronic materials, and radiation damage in materials.
Publications per year
1988–2001
9
9
Radiation Damage in SiO<sub>2</sub>/Si Induced by VUV Photons
Takashi Yunogami, Tatsumi Mizutani, Keizô Suzuki et al. · Japanese Journal of Applied Physics · 1989 · 132 citations
Etching technique for ruthenium with a high etch rate and high selectivity using ozone gas
M. Nakahara, Shozo Tsunekawa, Kenji Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 41 citations
Natural Sciences, Materials Engineering, Materials Science +13
Anisotropic etching of RuO2 and Ru with high aspect ratio for gigabit dynamic random access memory
Takashi Yunogami, Kazuo Nojiri · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 37 citations
Natural Sciences, Materials Engineering, Materials Science +16
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